> nanotechnologies > lithography > -the-decision-of-the-century-choosing-euv-lithography-asianometry

“The Decision of the Century”: Choosing EUV Lithography

Asianometry - 2023-06-11

Errata: 
2:28 - I should make more clear differences between Proximity and Projection Lithography. Both have a gap, but projection includes a lens 

Links:
- The Asianometry Newsletter: https://www.asianometry.com
- Patreon: https://www.patreon.com/Asianometry
- Twitter: https://twitter.com/asianometry

@nekomakhea9440 - 2023-06-12

Personally, I really enjoy the lithography videos. There isn't any other content like this on YouTube.

@47lokeshkumar74 - 2023-06-12

True. This will change my understanding. Please make video on mems optics and mems sensor.

@Tential1 - 2023-06-12

I can spot bs from 10 miles away when "analysts" talk about this business now. Like bruh... I watched every Asianometry video..... It's amazing how many people get to come on TV or other places as "experts" who don't have 1/5th the knowledge on the subject as what's been presented here. This is the future, it's insane how many people are half ass learning about this when it matters so much for so many different fields. I don't understand how people in finance can talk about tech without having a decent understanding of semiconductors as it drives most companies now.

@Gameboygenius - 2023-06-12

@@47lokeshkumar74 he already did two videos on MEMS and MEMS optics.

@williamstearns7490 - 2023-06-12

Indeed! Hell, I’ve watched all of them several times and often wished they were longer! I always want more…

@codyfan1097 - 2023-06-12

Best in class videos for sure

@MikeGaruccio - 2023-06-11

Sad to hear the lithography videos don’t seem to do well. They’re some of my favorites and I hope you can find time for a few more.

@Asianometry - 2023-06-12

Thanks. I appreciate it. Let's see if I can dig up something from somewhere.

@dylon4906 - 2023-06-12

same, these videos are so fascinating to me

@GermanMythbuster - 2023-06-12

my favorite videos too

@larryhsieh - 2023-06-13

To be honest, the main reason I'm subscribing is because of the lithography videos...

@nerkulec - 2023-06-15

@@Asianometry It is my favorite series of yours, but please keep doing whatever you feel like!

@nicholaselliott2484 - 2023-06-12

Don’t shy away from more lithography videos, obviously if they add insight (which you have a keen sense for), you have shown you are the guy to make them. Thanks!

@ParameterGrenze - 2023-06-12

Absolutely agree.

@filthyE - 2023-06-12

Totally agree. Don't focus too much on the viewer numbers — do what you're interested in!

@vannoo67 - 2023-06-12

I'm keen to hear about Nano Imprint Lithography

@JohnnieWalkerGreen - 2023-06-12

I know... I know... Encore... Encore... What next? Looking forward to another EU Video (oops EUV video)!

@JosTheelen - 2023-06-12

please go on with these video's

@spartacoos69 - 2023-06-11

I know it sucks when your video doesn't seem to get appreciated by the masses, but you're doing great work here. There are a thousand economic/tech history channels. What you put out with these is unique. Perhaps consider making these for a separate channel, or make a series?

@Bomkz - 2023-06-12

I second this! Literally one of my few favorite channels I repeatedly watch.

@raba2d723 - 2023-06-12

jon has almost half a million subscribers, not sure what you mean

@percyvile - 2023-06-12

A new channel seems foolhardy, but perhaps I misunderstand the YouTube algorithm.

@tissuepaper9962 - 2023-06-12

​@@percyvile it's called "siloing" and it can be more effective than having one channel if you seem to have two separate groups of subscribers watching different subsets of your content. It used to be normal to post a gaming video one day, then a vlog the next, and a range day video on the third, all on the same channel, but over the last few years people have realized that their disparate videos perform better on sepaprate channels.

@kpunkt98 - 2023-06-12

Really makes sense imo. If i sub to a channel exclusively for the highly technical videos about lithography etc. i dont wanna sift through all the vlogs on the same channel to get to the good stuff.

@glenyoung1809 - 2023-06-12

I appreciate these technical level videos you’ve put out there.
They have the same tone and ‘flavour’ as the old articles from pre-1995 Scientific American.
They aren’t meant for technical specialists already in the industry but they aren’t fluff videos which give little new understanding, the audience are more sophisticated non-specialists willing to use their brains to learn something new.
Your videos require the viewer to actually ‘think’ about the material and do a little work at trying to grasp the content.
Well done.

@thereissomecoolstuff - 2023-06-12

Trying to figure how to say exactly what you said. This is exceptional.

@milantrcka121 - 2023-06-12

Totally agree with the Scientific American reference. Have been reading SciAm continuously since 1972.

@ParameterGrenze - 2023-06-12

This video is exactly what I was looking for, an overview of the complexity scale and sheer madness of those printing machines that create our digital civilization. I asked myself the question wether this obviously over engineered monstrosities have alternatives that could be invented by china for example. The video put some light on the complexity of engineering, research and economics that led to the current designs. I would love for him to dive even deeper into hypothetical alternatives and future development

@dosgos - 2023-06-12

Right!

@mendocinolake6421 - 2023-06-12

I really miss the "tone and ‘flavour’ as the old articles from pre-1995 Scientific American." What a joy it was and it is no more.

@edsmithson975 - 2023-06-12

One small correction: As you said, first came contact printing, and then they provided a small gap between the mask and the wafer. This is call proximity printing. This greatly reduced defects. But to get to even more resolution, they moved the mask away from the wafer and put a lens in between the mask and the wafer. This is what is called projection printing or lithography. The image of the mask is projected onto the wafer. This was done at first across the whole wafer. To further improve resolution, they made step and repeat systems to project onto a small area of the wafer at a time. These are the steppers that we have to this day, but of course with increasingly higher resolution with every generation of the steppers.

@Asianometry - 2023-06-12

You're right. I'll correct this. Thanks

@musaran2 - 2023-06-12

And now even each step prints by scanning. (at least if I understood correctly)

@bill8985 - 2023-06-12

@@musaran2 actually, @2:36 there is an image of the Perkin Elmer "Micrascan". (the image says, "Stepper" - but it was the first "step-and-scan" system.) Eventually, PE got out of the litho market, selling the litho business to Silicon Valley Group (SVG) - and spinning off their e-beam business as "Etec." SVG was then acquired by ASML in 2001 - as PE had great optics technology needed for the then planned (and ill-fated) 157nm.

@flutie98 - 2023-06-15

There is actually one more historical shift and that is from steppers to scanners. The former projects the entire die/mask image onto the wafer and then steps to the next one. Modern scanners only illuminate a narrow slice (due to limitations of the 193nm lasers) and simultaneously translate the mask and the wafer to expose the entire die design.

@T3hderk87 - 2023-06-12

No please do not stop these! I love the nitty gritty tech lore!!! I hope others feel the same because you do a very good job on delivering highly technical articles in a way my smooth brain can comprehend.

@AltoidsYob - 2023-06-12

Patreon supporter here. I would actually love EVEN MORE lithography content, in even more gratuitous detail. That's one of the main things I'm here for and I really hope you continue to do videos like these. Good luck and thanks for your insights!

@percyvile - 2023-06-12

These videos are amazing, there's so little good content about the semiconductor industry. I can't even begin to imagine how much research this takes and the headaches of trying to access a lot of it (proprietary information and such). Thank you.

@mymodularjourney - 2023-06-12

Your Lithography videos are what brought me to the channel in the first place.
There are very few others that provide this level of detail and insight in this crucial industry.

@williamstearns7490 - 2023-06-12

I love your videos on EUV! I studied engineering, and still the entire process, the machines, the insane precision required, everything, still seems almost magical.

I don’t want LESS videos on the technology related to EUV. I want more!

@lurkingstar - 2023-06-12

for what it's worth, I love the lithography-focused videos

@MK_Grafik - 2023-06-12

I really enjoy these lithography videos, they are insightful and technical without being inaccessible. Your semiconductor videos probably give some of the best and most historical overview on the topic on the internet. I'm always happy to see them.

@kirkfranklinboy1986 - 2023-06-12

I am not 100% sure how I found your channel but your presentation style. It’s awesome. And I’m learning so much. Please don’t stop.

@LukeVilent - 2023-09-15

Dude, it were those lithography videos that made me back you on patreon. Basically, it is your videos that I inform myself of what's going on in the industry in general. And that is the industry I found myself being a part of recently, as Festo produces compressors that are used by Zeiss to create low-defect mirrors for EUV.

Keep it on!

@theneroliveira - 2023-06-12

I really only started following your channel for the Lithography videos as other have said, you do a great work on these subjects that not alot of people even talk about. so thank you for them!

@lesourire511 - 2023-06-12

... maybe less popular, but probably the most important. I was a coder in the early 80’s, writing the code that controlled the wafers traveling into and out of the quartz tube (on a quartz ‘boat’) to be heated,exposed to various gasses,etc. I moved on, but still code (a lot). It’s beyond remarkable how so many tools I wished I had access to then and over the years, are now so available.

Knowing the historical steps, ie, the what,why,when and where, etc, is hard to bring together. But you are serving up that history in a way that’s easier to digest than most sources. I’ve been surprised when you present other topics in such a similar way. They are all fascinating ... please don’t avoid this one though. It’s really the center pin so much advancement in every other arena.

@samgeorge4798 - 2023-06-11

Keep up the great work, your videos are in a class of there own. Almost 500k!

@bill8985 - 2023-06-12

The amazing thing about all this is the extent that sub-wavelength litho engineering really saved the day. Don't get me wrong, I am amazed when I look at the opening sequence and see that huge stainless proto EUV tool at ASML. Huge, klunky, lots of nuts and bolts and round doors sealing up various vacuum compartments. and to think that somehow they compressed all that crap into a standard footprint of any 193 tool. Just nuts. But beyond the notion of immersion, without the wild masks, or the various apertures or the super-clever OPC software, or the other many techniques and damn-near tricks - EUV progress would never have had enough time to meet up with Moore's Law. My hats off of course to the EUV geniuses. But more-so - to those who extended 193 beyond what was imaginable in the 1990s - extending a lifeline to NGL for at least another decade.

@Gameboygenius - 2023-06-12

I'm almost more impressed with 193 than EUV tbh. I feel like everyone knew EUV would work, and the battle was always economical viability. (Then we perfected tin droplets which tipped the scale and the rest is history.) However, the sub wavelength patterning done with 193 blows my mind. Are we talking half the wavelength? No, try 1/5, and that's apparently before taking multiple patterning into account. Learning about this broke my assumptions about the physics of light.

@shmookey - 2023-06-12

I agree with others' sentiment: please don't stop doing lithography videos, especially coverage of new developments. As you acknowledge, staying across this stuff requires a ton of research, and that's a tremendous gift to pass on - and you have a tremendous gift for conveying it. Your coverage is more than just insightful - it's an antidote to the frustration I share with many downstream consumers, to whom today's market conditions often elicit a certain cynicism of ignorance, which is a burden - "enlightening" would be a better word.

I appreciate that you have to consider viewership in choosing the topics you invest so much time on. In light of that, I pledge to increase my level of support on patreon and perhaps others who would wish for a continued focus on these less popular topics can do so too (and let you know). I don't care about membership tiers and special benefits: the content is special enough.

@sooocheesy - 2023-06-12

I work on photolithography equipment and personally never thought the day would come that EUV - with high cost/insane optic specs/stochastic defects/relatively low throughput - would be a mass market tool. Which really it isn't - there are only 3 or 4 companies using it at scale - due to "the 'juice not being worth the squeeze". It's simply too expensive and too few applications exist where EUV somehow improves the chip performance enough to justify the price. Plain old i-Line/248/193/193i DUV still makes the vast majority of chips you use today and will use in the future.

I suspect we're nearing the end of the road where we can keep making chips faster/cheaper by making them smaller. EUV will probably be the last generation of chip making equipment intended to go smaller and smaller, and quantum tunneling issues will determine at what size we stop.

@pavlomelnyk3188 - 2023-06-15

They were scarring us with quantum tuneling for a long time. It is all mater of probability. If we could somehow know if electron had tunneled so we would not count it as a signal. Then we could decrease the size even thurther and dill with height probability of tuneling

@Top-Code - 2023-08-11

@@pavlomelnyk3188you basically just ”if we could do something impossible, it would be possible!”

@bettergames6259 - 2023-10-15

Started watching your semiconductor videos as preparation for my job interview at ASML and will keep watching them. I have more knowledge about the history and players in the industry than most of my colleagues. Most comes from your videos.

@michaljurkovic - 2023-06-12

IMS Vienna afterwards switched from ions to electrons a created multibeam mask writer, which also allowed writing complex layouts on EUV masks in approx 10h, much shorter than with VSB writer.

@BustaaNut431 - 2023-06-11

Would love a that video on the future of Lithography after EUV

@benmcreynolds8581 - 2023-06-12

It's crazy how photons, electromagnetic Wave's, frequency, energy, vibration, mass. Are such fundamental aspects of EVERYTHING in our Cosmo's.

@markhonea2461 - 2023-06-12

I automatically know I am going to enjoy the content you put into your presentations as well as the delivery. This modern history's story is so totally fascinating, especially since it all happened during my lifetime, and until recently I knew nothing of it. Oh sure, snippets on the news and etc, but nothing like what you put forth.
It's so great, thanks!

@l2azic - 2023-06-13

You know what's crazy, a year ago, I watched your video on the renegade genius of TSMC Liang and I thought to myself.. "could I work there?" Well 4 months later and some motivation I was. And what's more crazy is the Fujifilm video came out a week ago now, and I'm going to do some work with them in a couple of weeks. Now I'm hoping I can be the guy to work on EUV! ( I love your content, you do many a great thing with letting it be on youtube!)

@MostlyPennyCat - 2023-06-12

I love your lithography videos.
I've been patiently waiting for this "runners up" video

@jrqv - 2023-06-12

I love the lithography "series" and would happily bingewatch a few more 😄

@driesvanoosten4417 - 2023-06-12

Actually, the Dutch company Mapper had a working multi beam electron beam lithography machine. 1800 parallel beams, if I'm not mistaken.

@MrHav1k - 2023-06-12

Greatly appreciate your work Asianometry. Thank you for putting this video out. Great stuff!

@dokov - 2023-08-10

Your lithography videos are one of my favorite videos on YouTube ever! Don't you dare ever stop doing them! :)

@nathancamel3070 - 2023-09-15

I love these lithography videos and I love the fact you have podcast versions, so that I can listen to it download at work it’s perfect please never stop ❤

@nic7nic - 2023-07-18

Making chips with multiple e beams is tried by the company MAPPER. They went bankrupt and got acquired by ASML. Probably because MAPPER was located in the Netherlands, like ASML, allowing ASML to buy some interesting patents and people nearby their HQ.

@davidgunther8428 - 2023-06-12

The SOHO solar observatory and the development of EVU optics for it was an important side quest on this journey.

I've heard EUV will take us to atomic scale resolutions, which is pretty much the end of that road. 😅 I suppose self assembled nano structures might be after that, but we still need some way to organize them into a complete device.

@Shinobubu - 2023-06-12

This was highly informative! keep making more Lithography videos :D

@sapiosuicide1552 - 2023-06-12

Even though this video will have less views, I appreciate this video and its research a lot. It's really one of the few sources that makes these concepts accessible and as an aspiring semiconductor engineer I really appreciate the overview

@ianmercer1291 - 2023-07-05

Your channel is awesome! I love this video as well. One comment though I think the biggest reason it's called EUV instead of soft x-ray is because at the time x-ray lithography at these wavelengths was tried many times but highly unsuccessful. So many PI's were most likely tired of hearing people wasting their time with this. So I think the decision was more to make it sound more appealing and avoid the large stigma towards x-ray lithography. Kinda a sales decision rather than an accuracy one if that makes sense.

@3800S1 - 2023-06-12

The lithography videos are one of if not my fav series you do, and satisfy the itch I get from lack of info on the subject elsewhere on the net.

@0neIntangible - 2023-06-12

Wow! Thank you for this wonderful capture of research developments over multiple decades with excellent short coverages of the various technologies that were potentially considered possible... and viable, for the times ahead.

@borisram - 2023-06-12

I Really love your lithography videos. Technical details makes me think about the extreme complexity of a technology almost every human uses and give for granted.

@jakejones5642 - 2023-06-12

I really enjoy your lithography videos, I can’t find anything like them anywhere on YouTube and it’s always nice to watch deep science/engineering dives on the part of the computer industry that is rarely shown. Keep up the good videos!

@TheLukeroge - 2023-06-12

These are absolutely fascinating and have information that I would otherwise find very hard to find, please keep making them :)

@RepChris - 2023-06-12

I absolutely love your lithography videos. Some of the best and the only current videos im aware of in that region; I watch ever single one of them. Most others ive seen are much to simplified to be interesting to me, ive already had the basics explained in my technical computer science courses, but i enjoy your presentation and that i actually get to learn new things.

Please keep them up, if you can (I can understand that you might not be able to if they perform poorly, thats OK although i will miss them dearly)

@LoveBbyJay - 2023-06-12

I love the lithography videos!! Please don't feel like no one enjoys them! It's always fascinating to see the journey lithography has taken to get to where we are today!!
As always thank you for the amazing video!!

@lexer_ - 2023-06-12

I had exactly the same question for a long time that you stated at the end there. Thank you for investigating this deeply for us.

@kingpetra6886 - 2023-06-12

Keep doing these types of videos. Some of us have followed this for along, long time. People don't fully appreciate the big bets taken over literally decades on the semiconductor industry.

@mattr1481 - 2023-06-24

thank you for your content. I am an engineer with a bachelors in semiconductor processing. your videos reinvigorate me to continue studying semi processing to be able to one day contribute to next gen ideas in the semi world and be respected for my experience even with just studying a bachelors. thank you

@haught7576 - 2023-06-12

I have no experience in this area, but your videos are always a great watch. Also very impressed by your out put, thanks for posting 🎉

@TrevorsMailbox - 2023-06-12

Dude...im sorry your first EUV video didn't do as well, but I learned sooooo much about EUV and lithography in the chip space in general from you. Fantastic work as usual.