Multiple patterning
https://en.wikipedia.org/wiki/Multiple_patterningDeep UV Photolithography
https://www.newport.com/n/deep-uv-photolithography“The Decision of the Century”: Choosing EUV Lithography (comparison with other lithography techniques : electrons, X-rays, ions...) - Asianometry
Can You Do "7nm" (N7) Chips Without EUV? The black magic of making 15nm-wide features with DUV light (λ=193nm, which cannot be sharper than kλ/NA=80nm) : {double,triple,quadruple} patterning, Litho-Etch-Litho-Etch, spacer patterning (sidewall (made by ALD) image transfer)... - Asianometry
Extreme ultraviolet lithography (very comprehensive) [EUV inefficient and optically much more complicated than DUV]
https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithographyThe Transistor That Won the World : the difficult begginings of the MOSFET [attention, erreurs factuelles sur la méthode de fabrication] - Asianometry
Self-aligned polysilicon gate metal-oxide-semiconductor field effect transistor for large area electronics
Why 157nm Lithography Failed - Asianometry
Semiconductor Immersion Lithography at 193nm (193i) - Asianometry
When an ASML Lithography Machine Goes Down - Asianometry